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Front Matter: Volume 10959
Eran Amit,Jason Arjavac, P.R. Atkins, Angela Brett,Brian M. Barnes, Norman Birnstein, Sergey M. Borisov,Sascha Brose, V. Brouzet,Stefan Buhl,Benjamin Bunday,Sven Burger, Hsien-Hung Chang,Jun‐Dong Chang, Nick Chang, Alon Chen,Kai-Hsiung Chen, Cheng Zhang, Chu-Han Chiu,Kevin Chou, Hung‐Kuo Chu,James Clarke, Avi J. Cohen, Andrew Cross, Den Boef, S Desmoulins,Christophe Dezauzier, Alain C. Diebold, Hideto Dohi,J. Ducotè, Albrecht Eberle,Martin Ebert, Mark G. Eller,Fang Wei, Hans Fritz,Andreas Frommhold, L. I. Gershteǐn, Eva Giannatou,Sven Glabisch,Anna Golotsvan, V Gredy, Charles Hagen, Reza Hajiahmadi, S. Hayashi,Mark-Alexander Henn,Jan Hermans, Akiko Hirai, Katsumi Hirose, Ho‐Han Hsu, Kwang-Young Hu, Guo Cai Huang, Shang‐Yu Huang, T.J. Huisman, Joey Hunsche, Jisung Hwang,Ishikawa Masayoshi,Izawa Masayuki, J. Simon Tony, Kai Kal, Nora N. Kammer, Angela Karvtsov, N Kaufmann, Hideyuki Kazumi,Anne Kenslea, Robert S. Kern, Mehdi Kessar, Sasan Keyvani,T Kiers, Jin‐Hoi Kim, Wansoo Kim, Young‐Seok Kim, Grigory Klebanov,Dana Klein,Sung-Woo Ko, Richard Kris, P. Kruit, Stefan Kuiper,Stéphane Larivière, Le Lazzarino, Delphine Le Cunff, L Lecarpentier, Brian Lee, D. A. Lee,D.S. Lee,Ho-Se Lee, Julie Lee, Jun Lei,Bertrand Le-Gratiet, Patrick Lemaire,Shimon Levi, Susan R. Levy, John C. Lin, Yu‐Ju Lin,Rex Liu,Gian F. Lorusso, Hsiang-Lan Lung,Lu‐Fang Ma,Ruben Maas,Chris A. Mack, Jan Willem Maes,Antonio Mani,Ming Mao,Gino Marcuccilli, Melvin Mathew, T. McDaniel, Olivier Mermet, Robert Michels,A Mili,Matthieu Milléquant,Milo Renan, Hiroshi Miroku, A. Moussa, Ingrid Müller,Victoria Naipak, Dan Nelson, Duyen Thi Cam Nguyen, Nishihata Noifeld, Ondřej Novák, Ankush Oberai,Nang-Lyeom Oh, Bryan Orf, Jason W. Osborne,Alain Ostrovsky,Shyh-Shii Pai,Chan-Ha Park, Chris Park,Shin-Woong Park,Anne Pastol, Svetlana Pastur, Oliver D. Patterson, Carlos A. Pereira, Jeffrey L. Peters, C. R. M. Prentice, Jie Zhang,Ivo W. Rangelow, Ao Ren,Christoph Reuter,John Robinson,Justin Roller,Vito Rutigliani, E. A. Schweikert,Shahrjerdy Mir,Yoshiki Shiba,Yong Kong Siew, Richard T. Silver,Aileen Soco, Ewa Sommer, Hyung-Sub Son,Hans-Jürgen Stock, Su Sufrin, Weiqiang Sun, Pei Tang,Wim Tel, David Tien, Ashley Tilson,Ian Tolle,J.H. Tortai, Li-Shiuan Tsai, Stephen Tseng,Dieter Van den Heuvel, Maarten van Es,Luc van Kessel, Van Roey,Stanislav V. Verkhoturov, Alon Volfman, F Wang, Y. Wang, Wei Weintraub, R Willekers
openalex（2019）
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The Study of Contact Hole for 65nm Node with Krf
Tae-Jun You,Sung-Woo Ko,James Moon,Yeong-Bae Ahn,Byung-Ho Nam,Dong-Gyu Yim
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2006)
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作者统计

#Papers: 6

#Citation: 18

H-Index: 2

G-Index: 4

Sociability: 4

Diversity: 1

Activity: 0

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