mitsuhiro togo

Mitsuhiro Togo received the B.S. degree in electrical and computer engineering from Yokohama National University, Hodogaya, Japan, in 1990 and the Ph.D. degree in electronic Engineering from the University of Tokyo, Tokyo, Japan, in 2004. In 1992, he was with Microelectronics Research Laboratories, NEC, working on scaled device physics, reliability, and process integration research. In 2008, he joined IMEC and has researched scaled high-performance device technologies. He is the author and coauthor of more than 50 journal and conference papers in the various semiconductor research areas including high-$k$ gate dielectrics, metal gates, and high mobility materials. Dr. Togo has been a member of the SEMI Technology Symposium program committees for advanced device since 2007.