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论文共 12 篇作者统计合作学者相似作者

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Scatterometry Overlay (SCOL?) Measurement of Small Cell Target Using Pupil Optimization
Itay Gdor, Einat Nagar,Tal Yaziv, Yunhua Wu,Eitan Hajaj, Yuval Lubashevsky,Daria Negri
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII (2023)
引用0浏览0引用
0
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Advanced Overlay Target Optimization and Integration in Optical Metrology
Eitan Hajaj,Diana Shaphirov, Eltsafon Ashwal,Chen Dror,Raviv Yohanan,Mark Ghinovker,Katya Gordon,Zephyr Liu,Xiaolei Liu, Isaac Salib
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021)
引用0浏览0引用
0
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Opo Reduction By Novel Target Design
Zephyr Liu,Eitan Hajaj, Ira Naot,Raviv Yohanan,Yoav Grauer
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIV (2020)
引用1浏览0引用
1
0
Improved Device Overlay By Litho Aberration Tracking With Novel Target Design For Dram
Xiaolei Liu,Eitan Hajaj, Alon Volfman,Hedvi Spielberg,Yoav Grauer,Raviv Yohanan,Xindong Gao
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIV (2020)
引用0浏览0引用
0
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Accuracy Optimization with Wavelength Tunability in Overlay Imaging Technology
Honggoo Lee, Yoonshik Kang, Sangjoon Han, Kyuchan Shim,Minhyung Hong,Seungyoung Kim,Jieun Lee,Dongyoung Lee, Eungryonh Oh,Ahlin Choi,Youngsik Kim,Tal Marciano,Dana Klein,Eitan M. Hajaj,Sharon Aharon,Guy Ben-Dov, Saltoun Lilach, Dan Serero,Anna Golotsvan
Metrology, Inspection, and Process Control for Microlithography XXXII (2018)
引用3浏览0引用
3
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作者统计

#Papers: 12

#Citation: 12

H-Index: 2

G-Index: 2

Sociability: 4

Diversity: 1

Activity: 0

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