Device Engineering Guidelines for Performance Boost in IGZO Front Gated TFTs Based on Defect Control
International Conference on IC Design & Technology（2022）
关键词
device engineering guidelines,defect control,amorphous InGaZnO thin film transistors,display panels,sensors,logic,neuromorphic computing applications,stack engineering,oxygen vacancies,hydrogen doping,contact metal scavenges oxygen,BEOL,IGZO TFT layer,InGaZnO
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