基本信息
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Career Trajectory
Bio
Sebastian Engelmann was born in Lichtenfels, Germany. He received the Vordiplom degree in physics from the University of Würzburg, Würzburg, Germany, in 2003, and the Ph.D. degree in materials science and engineering from the University of Maryland, College Park, MD, USA, in 2008. In 2008, he joined the IBM Thomas J. Watson Research Center, Yorktown Heights, NY, USA. He joined the Advanced Plasma Processing Group, IBM T. J. Watson Research Center, where he developed plasma etch processes to support future device generations for exploratory CMOS device research and devices beyond the CMOS era. His main research activities are developing plasma processes that enable the integration of Trigate and Nanowire device geometries, novel materials (SiGe, III-V, MRAM, etc.) or disruptive, new technology approaches (Photonics packaging, neuromorphic devices, IoT applications, etc.). He is author on more than 90 papers and inventor on more than 25 patents.
Research Interests
Papers共 152 篇Author StatisticsCo-AuthorSimilar Experts
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arXiv (Cornell University) (2023)
Jonathan Tennyson,Sebastian Mohr, M. Hanicinec,Anna Dzarasova, Carrick Smith, Sarah Waddington, Bingqing Liu,Luis L. Alves,Klaus Bartschat,Annemie Bogaerts,Sebastian U. Engelmann,Timo Gans,Andrew R. Gibson,Satoshi Hamaguchi,Kathryn R. Hamilton,Christian Hill,Deborah O'Connell,Shahid Rauf,Kevin van 't Veer,Oleg Zatsarinny
Optics expressno. 5 (2022): 7612-7612
L. Buzi, D. Koty,M. Hopstaken,J. Bruley,L. Gignac, M. Sagianis,D. Farmer,H. Miyazoe,A. Mosden,S. Engelmann, R. L. Bruce
ADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XI (2022)
2022 Conference on Lasers and Electro-Optics (CLEO)pp.1-2, (2022)
ADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XI (2022)
Advanced Etch Technology and Process Integration for Nanopatterning XI (2022)
Y. Kim,S-C Seo,S. Consiglio,P. Jamison, H. Higuchi,M. Rasch,E. Y. Wu,D. Kong,I Saraf,C. Catano,R. Muralidhar,S. Nguyen, S. DeVries,O. Van der Straten,M. Sankarapandian,R. N. Pujari,A. Gasasira, S. M. Mcdermott,H. Miyazoe, D. Koty, Q. Yang, H. Yan,R. Clark,K. Tapily,S. Engelmann, R. R. Robison,C. Wajda,A. Mosden,T. Tsunomura, R. Soave,N. Saulnier,W. Haensch,G. Leusink, P. Biolsi,V Narayanan,T. Ando
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Author Statistics
#Papers: 154
#Citation: 3699
H-Index: 30
G-Index: 54
Sociability: 6
Diversity: 3
Activity: 12
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