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ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXVIII (2021)
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXVII (2020)
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2020)
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Seiji Nagahara,Cong Que Dinh,Gosuke Shiraishi,Yuya Kamei,Kathleen Nafus,Yoshihiro Kondo,Michael Carcasi,Yukie Minekawa,Hiroyuki Ide,Yuichi Yoshida,Kosuke Yoshihara,Ryo Shimada,Masaru Tomono,Kazuhiro Takeshita,Serge Biesemans,Hideo Nakashima,Danilo De Simone,John S. Petersen,Philippe Foubert,Peter De Bisschop,Geert Vandenberghe,Hans-Juergen Stock,Balint Meliorisz
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXVI (2019)
Cong Que Dinh,Seiji Nagahara,Gousuke Shiraishi,Yukie Minekawa,Yuya Kamei,Michael Carcasi,Hiroyuki Ide,Yoshihiro Kondo,Yuichi Yoshida,Kosuke Yoshihara,Ryo Shimada,Masaru Tomono,Teruhiko Moriya,Kazuhiro Takeshita,Kathleen Nafus,Serge Biesemans,John S. Petersen,Danilo De Simone,Philippe Foubert,Peter De Bisschop,Geert Vandenberghe,Hans-Jurgen Stock,Balint Meliorisz
Extreme Ultraviolet (EUV) Lithography X (2019): 350-359
Cong Que Dinh,Seiji Nagahara,Gousuke Shiraishi,Yukie Minekawa,Yuya Kamei,Michael Carcasi,Hiroyuki Ide,Yoshihiro Kondo,Yuichi Yoshida,Kosuke Yoshihara,Ryo Shimada,Masaru Tomono,Teruhiko Moriya,Kazuhiro Takeshita,Kathleen Nafus,Serge Biesemans,John S. Petersen,Danilo De Simone,Philippe Foubert,Peter De Bisschop,Geert Vandenberghe,Hans-Juergen Stock,Balint Meliorisz
Extreme Ultraviolet (EUV) Lithography X (2019)
Michael A. Carcasi,Seiji Nagahara,Gosuke Shiraishi,Yukie Minekawa,Hiroyuki Ide,Kosuke Yoshihara,Masaru Tomono,Ryo Shimada,Geert Vandenberghe,Danilo De Simone,Philippe Foubert,Akihiro Oshima,Seiichi Tagawa,Kazuhiro Takeshita,Teruhiko Moriya,Yuya Kamei,Kathleen Nafus,Serge Biesemans,Hideo Nakashima,Hisashi Nakagawa,Takehiko Naruoka,Tomoki Nagai,Masafumi Hori,Satoshi Dei,Ken Maruyama,Yoshihiro Kondo,Masayuki Miyake,Motoyuki Shima,John S. Petersen
Extreme Ultraviolet (EUV) Lithography IX (2018)
Michael Carcasi,Seiji Nagahara,Gosuke Shiraishi,Yukie Minekawa,Hiroyuki Ide,Yoshihiro Kondo,Kosuke Yoshihara,Masaru Tomono,Ryo Shimada,Kazuhiro Takeshita,Teruhiko Moriya,Yuya Kamei,Kathleen Nafus,Serge Biesemans,Hideo Nakashima,Masafumi Hori,Ken Maruyama,Hisashi Nakagawa,Tomoki Nagai,Satoshi Dei,Masayuki Miyake,Takehiko Naruoka,Motoyuki Shima,Geert Vandenberghe,Danilo De Simone,Philippe Foubert,John S. Petersen,Akihiro Oshima,Seiichi Tagawa
Seiji Nagahara,Michael Carcasi,Gosuke Shiraishi,Yuya Kamei,Kathleen Nafus,Yukie Minekawa,Hiroyuki Ide,Yoshihiro Kondo,Takahiro Shiozawa,Keisuke Yoshida,Masashi Enomoto,Kosuke Yoshihara,Hideo Nakashima,Serge Biesemans,Ryo Shimada,Masaru Tomono,Kazuhiro Takeshita,Teruhiko Moriya, Makoto Hayakawa, Ryo Aizawa, Yoshitaka Konishi,Masafumi Hori,Ken Maruyama,Hisashi Nakagawa,Masayuki Miyake,Tomoki Nagai,Satoshi Dei,Takehiko Naruoka,Motoyuki Shima,Toru Kimura,Geert Vandenberghe,John S. Petersen,Danilo De Simone,Philippe Foubert,Hans-Juergen Stock,Balint Meliorisz,Akihiro Oshima,Seiichi Tagawa
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXV (2018): 6-16
Seiji Nagahara,Michael Carcasi,Gosuke Shiraishi,Hisashi Nakagawa,Satoshi Dei,Takahiro Shiozawa,Kathleen Nafus,Danilo De Simone,Geert Vandenberghe,Hans-Jurgen Stock,Bernd Kuchler,Masafumi Hori,Takehiko Naruoka,Tomoki Nagai,Yukie Minekawa,Tomohiro Iseki,Yoshihiro Kondo,Kosuke Yoshihara,Yuya Kamei,Masaru Tomono,Ryo Shimada,Serge Biesemans,Hideo Nakashima,Philippe Foubert,Elizabeth Buitrago,Michaela Vockenhuber,Yasin Ekinci,Akihiro Oshima,Seiichi Tagawa
作者统计
#Papers: 10
#Citation: 38
H-Index: 4
G-Index: 5
Sociability: 4
Diversity: 1
Activity: 0
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