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Edge Placement Error Wafer Mapping and Investigation for Improvement in Advanced DRAM Node
Kuan-Ming Chen, Wolfgang Henke, Ji-Hoon Jung, Ewa Kasperkiewicz, Anita Bouma, Rizvi Rahman, Gratiela Isai,Gwang-Gon Kim, Sotirios Tsiachris, Jae-Doug Yoo, Yuna Park, JaeYoung Park, Jonggeun Won,Nang-Lyeom Oh, Hsin-Yu Chen, WeiTai Lin,Chih-Hung Hsieh,Kuo-Feng Pao,Kyoyeon Cho,Abdalmohsen Elmalk,Sudharshanan Raghunathan,Taekwon Jee,Seung-Uk Jeong,Jeongwoo Jae,Sang-Woo Kim,Dongyoung Lee,Jungchan Kim,WonKwang Ma,Sang-Ho Lee,Chan-Ha Park
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021)
引用0浏览0引用
0
0
Reduction of In-Lot Overlay Variation with Integrated Metrology, and A Holistic Control Strategy
Hong-Goo Lee,Sang-Jun Han,Won-Kwang Ma,Young-Sik Kim,Noh-Jung Kwak, Paul Boecker,David Deckers,Weitian Kou,Michiel Kupers, Kevin Ryan,Elliott McNamara,Gwang-Gon Kim,Kyu-Tae Sun, Young-Wan Lim,Jin-Moo Byun, Jung-Joon Suh
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2015)
引用1浏览0引用
1
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Defect printability and specification of ArF mask in repeating feature
Wanho Kim,Wonkwang Ma,Heebom Kim
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) (2002): 1357-1365
引用3浏览0引用
3
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作者统计

#Papers: 10

#Citation: 19

H-Index: 3

G-Index: 3

Sociability: 4

Diversity: 1

Activity: 0

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