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Large Field of View Metrology: Detecting critical Edge Placement Error signatures not seen with small Field of View in an HVM environment
Mohamed Ridane, Ivy Chen, Jaden Song,Peter Nikolsky, Kuan-Ming Chen, Shinyeong Lee,Sean Park,Kolos Lin,Yu-Chi Su,Kyoyeon Cho, Ethan Yu, James Park,Abdalmohsen Elmalk,Chih-Hung Hsieh,Alexander Serebryakov, Lei Zhang,Taekwon Jee, Joonsang You,Hong-Goo Lee, Jongmin Park,Jungchan Kim,Sang-Woo Kim,Seungmo Hong, Jaewook Seo
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII (2023)
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Edge Placement Error Wafer Mapping and Investigation for Improvement in Advanced DRAM Node
Kuan-Ming Chen, Wolfgang Henke, Ji-Hoon Jung, Ewa Kasperkiewicz, Anita Bouma, Rizvi Rahman, Gratiela Isai,Gwang-Gon Kim, Sotirios Tsiachris, Jae-Doug Yoo, Yuna Park, JaeYoung Park, Jonggeun Won,Nang-Lyeom Oh, Hsin-Yu Chen, WeiTai Lin,Chih-Hung Hsieh,Kuo-Feng Pao,Kyoyeon Cho,Abdalmohsen Elmalk,Sudharshanan Raghunathan,Taekwon Jee,Seung-Uk Jeong,Jeongwoo Jae,Sang-Woo Kim,Dongyoung Lee,Jungchan Kim,WonKwang Ma,Sang-Ho Lee,Chan-Ha Park
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021)
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作者统计

#Papers: 3

#Citation: 1

H-Index: 1

G-Index: 1

Sociability: 3

Diversity: 1

Activity: 0

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