Sillon, N.

Nicolas Sillon received the Ph.D. degree from the National Polytechnic Institute of Grenoble, Grenoble, France, in 2001. During his doctoral work, he developed a silicon micromachined mass spectrometer. He joined the Electronics and Information Technology Laboratory French, Atomic Energy Commission, Micro and Nanotechnologies Campus, Grenoble, and has been working on micro-electro-mechanical systems (MEMS) manufacturing radio frequency MEMS, accelerometers, MEMS packaging, thin-film packaging, and wafer-level vacuum encapsulation for three years. He is now in charge of the Packaging and Integration Technologies Laboratory, Grenoble. This laboratory is essentially involved in wafer-level technologies for MEMS packaging and heterogeneous integration.