Lionel Buchaillot

Lionel Buchaillot is currently a Centre National de la Recherche Scientifique (CNRS) Senior Researcher. He received the M.S. degree in material sciences and the Ph.D. degree in mechanical engineering from the Université de Franche-Comté, Besançon, France, in 1991 and 1995, respectively. From 1995 to 1997, he was with the Laboratory for Integrated MicroMechatronic Systems-CNRS-IIS, University of Tokyo, Tokyo, Japan, as a JSPS Post-Doctoral Fellow working on thin-film shape memory alloys actuators for microelectromechanical systems (MEMS). In 1997, he was a Research and Development Engineer with SAFRAN, Paris, France, and AVIAC Technologies, Mantes-la-Jolie, France. In 1998, he joined the Department of ISEN, CNRS, Institute of Electronics, Microelectronics and Nanotechnology (IEMN), Villeneuve d’Ascq, France. He was the Head of the Silicon-Based MEMS Research Group at IEMN from 2001 to 2009. In 2010, he became the Director of IEMN. His research focuses on mechanical sensors and systems, RF MEMS/MEMS for microwaves, and scientific micro and nanoinstruments. He has authored or co-authored over 100 papers and several book chapters. He is an Editor of the IEEE Journal of Microelectromechanical Systems and the IOP’s Journal of Micromechanics and Microengineering. He was a recipient of the CNRS Bronze Medal.