(BT) Boon Teik Chan

Current projects: - 1. RMG / Metal Gate Cut 2. Semiconductor Quantum Computing spin qubit device 3. 3D Logic CFET (iN3+) integration 4. Area Selective Deposition Past projects: - 1. DSA for Chemo L/S with 24/28nm L0 & high-Chi BCP with 16/19nm L0g. 3D Sequential Integration 2. DSA for Chemo C/H with 45/30nm L0 and grapho C/H for DUV/EUV template 3. DSA-SIS infiltration on BCP. 4. VFET for N5/N3 - Si / SiGe pillar / aSi patterning. 5. EU EP7 - SNM project sub-10nm patterning with t-SPL