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论文共 20 篇作者统计合作学者相似作者

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Global Tilt Extraction for BEOL Contact Landing Displacement Control
Yung-Yi Lin, Tien-Jung Lee, Hsiao-Fei Su, Yen-Hung Liu,Chao-Yu Cheng, Christopher Liman, Boxue Chen,Zhengquan Tan,Yuan-Chieh Chiu, Chiung-Kun Huang, Ying-Hung Liang,Hong-Ji Lee,Nan-Tzu Lian
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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Enable In-Die Overlay Measurement on DRAM Storage Node by Line Scan Self-Calibration Method
June Yeh,Sam Tsai, Cheng An Lin, Cheng Wei Yang, Kai Ping Chan, Cheng Ta Cheng, Foster Huang, Henry Chen, Cheng-Hang Yang, York Yang, Peter Paquet,Houssam Chouaib,Zhengquan Tan
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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Global Tilt Measurement on Irregular PIL Supporting Patterns in 3D NAND Memory
Yung-Yi Lin, Tien-Jung Lee, Hsiao-Fei Su, Yen-Hung Liu,Chao-Yu Cheng, Christopher Liman, Boxue Cen,Zhengquan Tan,Ming-Tsung Wu, Min-Hsuan Huang,Yao-Yuan Chang,Hong-Ji Lee,Nan-Tzu Lian
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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Optical in Die NZO Benefit for DRAM Manufacturing
June Yeh,Sam Tsai, Hsiao Lun Chu, Kai Lee, York Yang,Houssam Chouaib,Zhengquan Tan
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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Scatterometry Critical Dimension Solution for Gate All Around Sheet-Specific Metrology: Topic/category: Advanced Metrology
Houssam Chouaib, Anderson Chou, Valeria Dimastrodonato, HaoMiao Chang,Zhengquan Tan,Derrick Shaughnessy
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-8, (2024)
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Mueller Matrix Spectroscopy and Physics-Based Machine Learning for Gate- All-Around Sheet-Specific Metrology
Houssam Chouaib, Anderson Chou, Valeria Dimastrodonato, Shawn Lin, Ben Hsieh, HaoMiao Chang, James Chuang, Brooks Hsiao,Stilian Pandev,Zhengquan Tan,Derrick Shaughnessy
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII (2023)
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Flash Memory Hole Etch Profile Monitoring Using X-Ray and Optical Scatterometry
Osman Sorkhabi,Jin Zhang, Dawei Hu, Adili Aiyiti, Yung-Yi Lin, Maggie Li, Ha Quoc Thang Bui, Dave Oak,Peimei Da,Zhengquan Tan
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3no. 3 (2023)
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作者统计

#Papers: 20

#Citation: 218

H-Index: 8

G-Index: 11

Sociability: 4

Diversity: 1

Activity: 0

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