Enable In-Die Overlay Measurement on DRAM Storage Node by Line Scan Self-Calibration Method

June Yeh,Sam Tsai, Cheng An Lin, Cheng Wei Yang, Kai Ping Chan, Cheng Ta Cheng, Foster Huang, Henry Chen, Cheng-Hang Yang, York Yang, Peter Paquet,Houssam Chouaib,Zhengquan Tan

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII（2024）

Cited 0|Views1

No score

Key words

in-die overlay (IDO),machine learning,scatterometry,spectroscopic ellipsometry (SE),Mueller matrix,Confidence Index (CIndex),SpectraShape 11k

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined