Research Interests

Papers共 26 篇Author StatisticsCo-AuthorSimilar Experts

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Scatterometry Control for Multiple Electron Beam Lithography
Yoann Blancquaert,Nivea Figueiro,Thibault Labbaye,Francisco Sanchez,Stephane Heraud,Roy Koret,Matthew Sendelbach, Ralf Michel,Shay Wolfling,Stephane Rey,Laurent Pain
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2017)
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#Papers: 26

#Citation: 217

H-Index: 8

G-Index: 14

Sociability: 5

Diversity: 2

Activity: 0

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