按年份排序按引用量排序主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XIX, PTS 1 AND 2 (2002): 741-753
4
0
OPTICAL MICROLITHOGRAPHY XIII, PTS 1 AND 2 (2000): 952-961
0
0
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (1999)
4
0
MICROELECTRONIC ENGINEERINGno. 1-4 (1997)
0
0
Microelectronic Engineering (1997): 109-112
EI
0
0
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (1997)
20
0
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