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Research Interests

Papers共 13 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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期刊级别
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合作机构
MIM capacitor with enhanced capacitance
A Farcy,Maryline Thomas,Joaquin Torres, Sonarith Chhun, Laurentgeorges Gosset
mag（2010）
Cited23Views0Bibtex
23
0
Circuit performance dependence on BEOL processes and variability
Alexis Farcy,Michel Gallitre, Vincent Arnal,Cedric Bermond,Benjamin Blampey,Bernard Flechet,Joaquin Torres
ADVANCED METALLIZATION CONFERENCE 2007 (AMC 2007) (2008): 285-291
Cited0Views0Bibtex
0
0
Hybrid CoWP/SiCN barriers integration using Hybrid Punch Through approach
Julie Guilan, Laurent Georges Gosset,Regis Delsol, Philippe Brun, Emmanuel Ollier, Emmanuel Petitprez, Valerie Girault,Raphael Gras,Joaquin Torres
ADVANCED METALLIZATION CONFERENCE 2007 (AMC 2007) (2008): 17-22
Cited0Views0Bibtex
0
0
Impacts of Cu metallization on high density Damascene Cu/TiN/Ta2O5/TiN/CU metal-insulator-metal capacitors
Maryline Thomas,Alexis Farcy, Cedric Perrot,Mickael Gros-Jean, Patrick Joubin,Igor Matko, Maryline Cordeau,Pierre Caubet, Rym Benaboud, Alexandre Bonnard, Simon Guillaumet,Thierry Jagueneau,
ADVANCED METALLIZATION CONFERENCE 2006 (AMC 2006)pp.177-183, (2007)
Cited0Views0Bibtex
0
0
Integration and characterization of a hybrid Cu line coating using CoWP self aligned barrier capped with a low-K etch stop liner
Julie Guillan, Laurent G. Gosset, Sonarith Chhun,Michel Gallitre,Alexis Farcy, Emmanuel Ollier, Philippe Brun, Valerie Girault, Emmanuel Petitprez,Marc Juhel,Raphaeel Gras, Arulkumar Shanmugasundram,
Advanced Metallization Conference 2006 (AMC 2006)pp.105-110, (2007)
Cited0Views0Bibtex
0
0
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