Jun Yan

Jun Yan received the B.S. degree from the Wuhan Institute of Chemical Technology, Wuhan, China, in 1996, the M.S. degree from the South China University of Technology, Guangzhou, China, in 2001, and the Ph.D. degree from the University of Arizona, Tucson, in 2006, all in chemical engineering. He is currently a Process Engineer with Lam Research Corporation, Fremont, CA. He was a Research Assistant Professor with the University of Arizona in 2011. He also was an Assistant Engineer with Wuhan Chemical Engineering Corporation, Wuhan, from 1996 to 1998, and a Research Scientist with the Environmental Metrology Corporation, Tucson, from 2008 to 2011. His current research interests include developing front-end etching processes for current and future technology nodes.