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论文共 84 篇作者统计合作学者相似作者

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Superlattice Effects and Limitations of Non-Destructive Measurement of Advanced Si/Si(1-x)Ge(x) Superlattice Structures Using Mueller Matrix Scatterometry (MMSE) and High-Resolution X-Ray Diffraction (XRD)
Ezra Pasikatan,G. Andrew Antonelli,Nicholas Keller,Subhadeep Kal, Matthew Rednor, Markus Kuhn, Satoshi Murakami, Alain C. Diebold
Journal of Micro/Nanopatterning, Materials, and Metrologyno. 04 (2024)
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3D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements with Infrared Metrology
Youcheng Wang, Zhuo Chen,Cong Wang,Nick Keller,G. Andrew Antonelli,Zhuan Liu,Troy Ribaudo, Rostislav Grynko
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURINGno. 3 (2024): 244-250
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Characteristic Mueller matrix responses and correlation analysis for vertical GAA nanowire structure manufacturing using RCWA simulated spectra
Colin Wadsworth, Ezra Pasikatan,Nicholas Keller,G. Andrew Antonelli, Alain C. Dieboldb
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII (2023)
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3D NAND Oxide/Nitride Tier Stack Thickness Measurements with Infrared Metrology
Youcheng Wang, Zhuo Chen, Cong Wang,Nick Keller,G. Andrew Antonelli,Zhuan Liu,Troy Ribaudo, Rostislav Grynko
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-8, (2023)
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Non-Contact, In-Line Thermal Characterization Capability with Time Domain Thermoreflectance
Robin Mair,G. Andrew Antonelli,Manjusha Mehendale,Priya Mukundhan, Beth May,Karen Terry, Nathaniel Brandt, Xiaoyue Phillip Huang,Tong Zhao
2022 33RD ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) (2022)
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作者统计

#Papers: 84

#Citation: 1689

H-Index: 25

G-Index: 37

Sociability: 5

Diversity: 2

Activity: 8

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