Subwavelength Grating Cascaded Microring Resonator Biochemical Sensors with Record-High Sensitivity
2024 Conference on Lasers and Electro-Optics (CLEO)（2024）
关键词
Microring Resonators,Biochemical Sensors,Subwavelength Grating,Refractive Index,Physical Measures,Quality Factor,Fourth Step,Resonance Peak,Electron Beam Lithography,Limit Of Detection Values,Photonic Integrated Circuits,Silicon-on-insulator,Ring Resonator,Bragg Grating,Sodium Chloride Concentration,Optical Spectrum Analyzer,Scanning Electron Microscopy Pictures,Free Spectral Range,Grating Period,Slot Width
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