Ultra-large Strain Response in BNT-BT-KNN Thin Films Boosted by Electric Field-Induced Inversion of Long-Range Ordered Polarization

Bismuth sodium titanate (BNT)-based piezoelectric materials are the most promising candidates for lead-free actuator applications. With the request for integration and size miniaturization of devices, it is urgent to develop thin films for microdevices to be compatible with semiconductor processes. Through composition engineering, BNT-based thin films were fabricated on silicon substrates, with ultra-high strain response and negligible hysteresis in strain curves. The DC-dependent and temperature-dependent dielectric properties were collected to investigate the relaxor state of thin films. The structure and polarization transition and evolution as a function of electric field and time were analyzed based on the electric characterization, in-situ Raman measurements, and dynamics PFM. The reversible phase transition and polarization order-disorder transformation are the most significant features for reaching a large strain of >1.6% in BNT-based thin films.