Measuring Coefficient of Thermal Expansion of Materials of Micrometre Size Using SEM/FIB Microscope with in Situ MEMS Heating Stage.

Stuart Robertson, Andrew McClintock,Kenny Jolley,Han Zhou,Sam Davis,Houzheng Wu,Changqing Liu,Scott Doak,Zhaoxia Zhou

JOURNAL OF MICROSCOPY（2024）

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关键词
coefficient of thermal expansion,copper,CTE,graphite,in situ MEMs heating,SEM/FIB
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