AlN Self-Rolled-Up Microtube Resonators with Multimode Resonances for On-Chip Optomechanical Sensing
2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS（2024）
关键词
Aluminum nitride (AlN),self-rolled-up membrane (S-RuM),microtubes,MEMS,optomechanics,mass sensing
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