High-Performance Monolithic 3D Integrated Complementary Inverters Based on Monolayer N-Mos2 and P-Wse2

Ming-Jin Liu, Wei-Jie Lan, Cai-Syuan Huang, Chang-Zhi Chen,Ruei-Hong Cyu,Paul Albert L. Sino, Yu-Lun Yang,Po-Wen Chiu,Feng-Chuan Chuang,Chang-Hong Shen,Jyun-Hong Chen,Yu-Lun Chueh

SMALL（2024）

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2D TMDs,chemical vapor deposition,MoS2,monolithic 3D,WSe2

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