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Isolation of Bidimensional Electron Gas in AlGaN/GaN Heterojunction Using Ar Ion Implantation

Antonino Scandurra, Matteo Testa,Giorgia Franzo,Giuseppe Greco,Fabrizio Roccaforte,Maria Eloisa Castagna,Cristiano Calabretta,Andrea Severino,Ferdinando Iucolano,Elena Bruno,Salvatore Mirabella

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING（2023）

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关键词
Gallium nitride,2DEG isolation,Ion implantation,Photoluminescence,Mercury probe
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