Uniformity and Yield Optimization for a Highly Diverse Product Mix : Topic: YE

Raymond Van Roijen, Mark Lucksinger, Matthew Fields, Robert Baiocco, Min S. Oh, Derek Stoll

2020 31ST ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC)（2020）

引用 0|浏览0

暂无评分

关键词

highly diverse product mix,Semiconductor industry,technology node,different markets,chip size,process control,productivity,production line,Logic chips,specific changes

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要