Optimization of fully-depleted gated PPD pixel for achieving high-speed charge transfer

A design of experiments (DOE) technique using Taguchi’s orthogonal arrays is successfully applied to a gated PPD pixel design with different pixel sizes for optimizing the charge transfer speed. A 15 μm pixel achieving 2.5 ns, and a 5 μm pixel achieving 1 ns in collecting 90% of carriers from the backside to the storage node with a fullydepleted epi-layer of 30 μm are presented. An initial evaluation of a test vehicle employing 5 μm pixels is also given.