Edge Placement Error Fundamentals and Impact of EUV: Will Traditional Design-Rule Calculations Work in the Era of EUV?

Allen H. Gabor,Andrew C. Brendler,Timothy A. Brunner,Xuemei Chen,James A. Culp,Harry J. Levinson

Journal of Micro/Nanolithography, MEMS, and MOEMS（2018）

引用 12|浏览8

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EUV,design-rules,edge placement error,EPE,stochastics,skew,kurtosis

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