Thin-Film Piezoelectric MEMS Transducer Suitable for Middle-Ear Audio Prostheses

Humberto Campanella,Carlos J. Camargo, Javier Lopez Garcia,Alberto Daza,Rafael Urquiza,Jaume Esteve

Journal of microelectromechanical systems（2012）

引用 8|浏览9

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关键词

Aluminum nitride (AlN) devices and transducers,implantable audio prostheses,microelectromechanical systems (MEMS) transducer,piezoelectric transducers

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