Investigation of Euv Tapeout Flow Issues, Requirements and Options for Volume Manufacturing

Jonathan Cobb,Sunghoon Jang,Junghoon Ser,Insung Kim,Johnny Yeap,Kevin Lucas,Munhoe Do,Young-Chang Kim

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2011）

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Key words
EUV lithography,EUV OPC flow,OPC TAT
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