Epitaxial Growth of Si:C Alloys : Process Development and Challenges

A. Dube,A. Chakravarti,R. Takalkar,J. Li,F. Yang,A. Madan,Z. Zhu,R. Loesing,R. Murphy,T. N. Adam, L. R. Black,J. R. Holt,E. C. T. Harley, M. W. Stoker, D. J. Schepis, X. Chen

Meeting abstracts/Meeting abstracts (Electrochemical Society CD-ROM)（2010）

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Epitaxial Growth

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