Graphoepitaxial And Chemoepitaxial Methods For Creating Line-Space Patterns At 33nm Pitch: Comparison To A Hvm Process

Dan Millward,Gurpreet S Lugani,Scott L Light,Ardavan Niroomand,Phillip D Hustad,Peter Trefonas,Dung Quach,Valeriy V Ginzburg

ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES VII（2015）

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hvm process,chemoepitaxial methods,line-space

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