Method for improved plasma nitridation of ultra thin gate dielectricsMukesh V Khare,C Demic, Thomas T Hwang,P Jamison,James J Quinlivan,Beth A Wardmag(2002)引用 39|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要