Tianyu Ma(马天予)

Tianyu Ma received the B.S. degree from the Department of Physics, University of Science and Technology of China, Hefei, China, in 2009. Since 2009, he has been pursuing the M.S. and Ph.D. degrees at the Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China. His main research interests include theories and models of Chemical Mechanical Polishing process and dummy fill in integrated circuits.