Thomas Houghton

Thomas Houghton received the B.S. degree in chemical engineering and the M.S. degree in manufacturing engineering. He currently works with GLOBALFOUNDRIES, Fishkill, NY, USA, integrating photonics FBEOL processing for fiber coupling into CMOS technologies. He joined IBM in 1981 at the East Fishkill site with the Process Development Unit. Over the past 37 years, he has worked on all aspects of BEOL wiring technology on the procession of process nodes for early manufacturing introduction up through yield ramp and continuous improvement. Since the past two years, he has concentrated on devising the process adaptations and improvements needed to implement the 200-mm V-Groove technology into the 300-mm manufacturing line.