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Research Interests

Papers共 31 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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期刊级别
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Investigating the Impact of Pad Groove Depth Reduction on Process Variation in Oxide Chemical Mechanical Polishing
Pengzhan Liu, Chul Kang, Shinil Oh,Sanghuck Jeon, Hyeonjeong Lee, Ziyang Wang, Hyunjin Jeong, Euihaeng Lee,Taesung Kim
ECS Journal of Solid State Science and Technology (2024)
Cited0Views0Bibtex
0
0
Investigation of Thermal Effects in Bulk Oxide Chemical Mechanical Polishing
Pengzhan Liu, Wookyung Jeon, Jangwon Seo,Seunghwan Lee, Ziyang Wang, Hyeonjeong Lee,Sanghuck Jeon,Taesung Kim
Precision engineering (2024)
Cited0Views0Bibtex
0
0
Investigation of Polisher Head and Slurry Sweep Effect in Oxide Film Polishing
Pengzhan Liu, Chul Kang,Kihong Park,Sanghuck Jeon, Ziyang Wang, Hyeonjeong Lee, Hyunjin Jeong, Euihaeng Lee,Taesung Kim
ECS journal of solid state science and technology (2024)
Cited0Views0Bibtex
0
0
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Author Statistics

#Papers: 31

#Citation: 68

H-Index: 4

G-Index: 5

Sociability: 5

Diversity: 2

Activity: 37

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  • 学生
  • 导师
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