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Linmiao Zhang, William Susanto, Katsumasa Takahashi,Albert Chen, Tim Tang, Yi Zou,Chenxi Lin,Simon Hastings,Samee Ur Rehman,Manouk Rijpstra, Alfonso Sun
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIV (2020)
Cyrus E. Tabery,Vito Rutigliani,Hastings Simon Philip Spencer,Etienne de Poortere, Luke wang,Philippe Leray,Guillaume Schelcher, Yongjun Wang
Metrology, Inspection, and Process Control for Microlithography XXXIII (2019)
Brenda L. Sanchez-Gaytan,Zhaoxia Qian,Simon P. Hastings, Michael L. Reca,Zahra Fakhraai,So-Jung Park
K Abe,N Abgrall,Y Ajima,H Aihara,J B Albert,C Andreopoulos,B Andrieu,S Aoki,O Araoka,J Argyriades,A Ariga,T Ariga,S Assylbekov,D Autiero,A Badertscher,M Barbi,G J Barker,G Barr,M Bass,F Bay,S Bentham,V Berardi,B E Berger,I Bertram,M Besnier,J Beucher,D Beznosko,S Bhadra, M,A Blondel,C Bojechko,J Bouchez,S B Boyd,A Bravar,C Bronner,D G Brook-Roberge,N Buchanan,H Budd,D Calvet,S L Cartwright, A Carver,R Castillo,M G Catanesi,A Cazes,A Cervera,C Chavez,S Choi,G Christodoulou,J Coleman,W Coleman,G Collazuol,K Connolly,A Curioni,A Dabrowska,I Danko,R Das,G S Davies,S Davis,M Day,G De Rosa,J P A M de André,P de Perio,A Delbart,C Densham,F Di Lodovico,S Di Luise,P Dinh Tran,J Dobson,U Dore,O Drapier,F Dufour,J Dumarchez,S Dytman,M Dziewiecki,M Dziomba,S Emery,A Ereditato,L Escudero,L S Esposito,M Fechner,A Ferrero,A J Finch,E Frank,Y Fujii,Y Fukuda, V Galymov,F C Gannaway,A Gaudin,A Gendotti,M A George,S Giffin,C Giganti,K Gilje,T Golan,M Goldhaber, J,M Gonin,N Grant,A Grant,P Gumplinger,P Guzowski,A Haesler,M D Haigh, K Hamano, C Hansen,D Hansen,T Hara,P F Harrison,B Hartfiel,M Hartz, T Haruyama,T Hasegawa,N C Hastings,S Hastings,A Hatzikoutelis,K Hayashi,Y Hayato,C Hearty,R L Helmer,R Henderson,N Higashi,J Hignight,E Hirose,J Holeczek,S Horikawa,A Hyndman,A K Ichikawa,K Ieki,M Ieva, M Iida,M Ikeda,J Ilic,J Imber,T Ishida,C Ishihara, T Ishii,S J Ives,M Iwasaki,K Iyogi,A Izmaylov,B Jamieson,R A Johnson, K,G V Jover-Manas,C K Jung,H Kaji, T Kajita,H Kakuno,J Kameda,K Kaneyuki,D Karlen,K Kasami,I Kato,E Kearns,M Khabibullin,F Khanam,A Khotjantsev,D Kielczewska,T Kikawa, J Kim, J Y Kim,S B Kim,N Kimura,B Kirby,J Kisiel,P Kitching,T Kobayashi,G Kogan,S Koike,A Konaka, L,A Korzenev,K Koseki,Y Koshio,Y Kouzuma,K Kowalik,V Kravtsov,I Kreslo,W Kropp,H Kubo,Y Kudenko,N Kulkarni,R Kurjata,T Kutter,J Lagoda,K Laihem,M Laveder,K P Lee,P T Le,J M Levy,C Licciardi,I T Lim,T Lindner,R P Litchfield,M Litos,A Longhin,G D Lopez,P F Loverre,L Ludovici,T Lux,M Macaire,K Mahn,Y Makida,M Malek,S Manly,A Marchionni,A D Marino,J Marteau,J F Martin,T Maruyama,T Maryon,J Marzec,P Masliah,E L Mathie,C Matsumura,K Matsuoka,V Matveev,K Mavrokoridis,E Mazzucato,N McCauley,K S McFarland,C McGrew,T McLachlan,M Messina,W Metcalf,C Metelko,M Mezzetto,P Mijakowski, C A Miller,A Minamino,O Mineev,S Mine, A D Missert, G Mituka,M Miura,K Mizouchi,L Monfregola,F Moreau,B Morgan,S Moriyama,A Muir,A Murakami,M Murdoch,S Murphy,J Myslik,T Nakadaira,M Nakahata, T Nakai,K Nakajima,T Nakamoto,K Nakamura,S Nakayama,T Nakaya,D Naples, M L Navin, B Nelson,T C Nicholls,K Nishikawa,H Nishino,J A Nowak,M Noy,Y Obayashi,T Ogitsu,H Ohhata,T Okamura,K Okumura,T Okusawa,S M Oser,M Otani,R A Owen,Y Oyama,T Ozaki,M Y Pac,V Palladino,V Paolone,P Paul,D Payne,G F Pearce, J D Perkin,V Pettinacci,F Pierre,E Poplawska,B Popov, M Posiadala,J-M Poutissou,R Poutissou,P Przewlocki,W Qian,J L Raaf,E Radicioni,P N Ratoff,T M Raufer,M Ravonel,M Raymond,F Retiere,A Robert,P A Rodrigues,E Rondio,J M Roney,B Rossi,S Roth,A Rubbia,D Ruterbories,S Sabouri,R Sacco,K Sakashita,F Sánchez,A Sarrat,K Sasaki,K Scholberg,J Schwehr,M Scott,D I Scully,Y Seiya,T Sekiguchi,H Sekiya,M Shibata,Y Shimizu,M Shiozawa,S Short,M Siyad,R J Smith,M Smy,J T Sobczyk,H Sobel,M Sorel,A Stahl,P Stamoulis,J Steinmann,B Still,J Stone,C Strabel,L R Sulak,R Sulej,P Sutcliffe,A Suzuki, K Suzuki, S Suzuki,S Y Suzuki,Y Suzuki,T Szeglowski,M Szeptycka,R Tacik,M Tada,S Takahashi,A Takeda, Y Takenaga,Y Takeuchi, K Tanaka,H A Tanaka,M Tanaka,N Tanimoto, K Tashiro,I Taylor,A Terashima,D Terhorst,R Terri,L F Thompson,A Thorley,W Toki,T Tomaru,Y Totsuka,C Touramanis,T Tsukamoto,M Tzanov,Y Uchida,K Ueno,A Vacheret,M Vagins,G Vasseur,T Wachala,A V Waldron,C W Walter,P J Wanderer, J Wang, M A Ward,G P Ward,D Wark,M O Wascko,A Weber,R Wendell,N West,L H Whitehead, G Wikström,R J Wilkes,M J Wilking,J R Wilson,R J Wilson,T Wongjirad,S Yamada,Y Yamada,A Yamamoto,K Yamamoto,Y Yamanoi,H Yamaoka,C Yanagisawa,T Yano,S Yen,N Yershov,M Yokoyama,A Zalewska,J Zalipska,L Zambelli,K Zaremba,M Ziembicki,E D Zimmerman,M Zito, J Żmuda
K. Abe,N. Abgrall,H. Aihara,Y. Ajima,J. B. Albert, D. Allan,P-A Amaudruz,C. Andreopoulos,B. Andrieu,M. D. Anerella,C. Angelsen, S. Aoki,O. Araoka,J. Argyriades,A. Ariga,T. Ariga,S. Assylbekov, J. P. A. M. de Andre,D. Autiero,A. Badertscher,O. Ballester,M. Barbi, G. J. Barker,P. Baron, G. Barr,L. Bartoszek,M. Batkiewicz, F. Bay,S. Bentham,V. Berardi, B. E. Berger,H. Berns,I. Bertram,M. Besnier,J. Beucher,D. Beznosko, S. Bhadra,P. Birney,D. Bishop, E. Blackmore,F. D. M. Blaszczyk,J. Blocki, A. Blondel,A. Bodek,C. Bojechko, J. Bouchez,T. Boussuge, S. B. Boyd,M. Boyer, H. N. Braam,R. Bradford, A. Bravar, K. Briggs, J. D. Brinson,C. Bronner,D. G. Brook-Roberge, M. Bryant, N. Buchanan, H. Budd,M. Cadabeschi,R. G. Calland, D. Calvet,J. Caravaca Rodriguez, J. Carroll,S. L. Cartwright, A. Carver, R. Castillo, M. G. Catanesi,C. Cavata,A. Cazes,A. Cervera,J. P. Charrier, C. Chavez, S. Choi,S. Chollet,G. Christodoulou,P. Colas,J. Coleman,W. Coleman,G. Collazuol,K. Connolly,P. Cooke,A. Curioni,A. Dabrowska, I. Danko, R. Das, G. S. Davies, S. Davis, M. Day,X. De la Broise,P. de Perio,G. De Rosa,T. Dealtry,A. Debraine,E. Delagnes, A. Delbart, C. Densham,F. Di Lodovico,S. Di Luise,P. Dinh Tran,J. Dobson,J. Doornbos, U. Dore,O. Drapier,F. Druillole,F. Dufour,J. Dumarchez,T. Durkin, S. Dytman,M. Dziewiecki,M. Dziomba, B. Ellison, S. Emery,A. Ereditato, J. E. Escallier,L. Escudero, L. S. Esposito, W. Faszer,M. Fechner,A. Ferrero,A. Finch, C. Fisher,M. Fitton, R. Flight,D. Forbush, E. Frank,K. Fransham, Y. Fujii, Y. Fukuda, M. Gallop, V. Galymov, G. L. Ganetis,F. C. Gannaway,A. Gaudin,J. Gaweda, A. Gendotti, M. George,S. Giffin,C. Giganti,K. Gilje, I. Giomataris,J. Giraud, A. K. Ghosh,T. Golan, M. Goldhaber, J. J. Gomez-Cadenas,S. Gomi, M. Gonin, M. Goyette, A. Grant, N. Grant,F. Granena,S. Greenwood,P. Gumplinger, P. Guzowski,M. D. Haigh, K. Hamano, C. Hansen, T. Hara, P. F. Harrison, B. Hartfiel,M. Hartz, T. Haruyama,R. Hasanen, T. Hasegawa, N. C. Hastings,S. Hastings, A. Hatzikoutelis, K. Hayashi, Y. Hayato, T. D. J. Haycock, C. Hearty, R. L. Helmer, R. Henderson,S. Herlant, N. Higashi,J. Hignight,K. Hiraide, E. Hirose,J. Holeczek,N. Honkanen,S. Horikawa,A. Hyndman, A. K. Ichikawa,K. Ieki, M. Ieva, M. Iida, M. Ikeda,J. Ilic,J. Imber, T. Ishida,C. Ishihara, T. Ishii,S. J. Ives,M. Iwasaki,K. Iyogi,A. Izmaylov,B. Jamieson, R. A. Johnson, K. K. Joo,G. Jover-Manas, C. K. Jung, H. Kaji, T. Kajita,H. Kakuno,J. Kameda, K. Kaneyuki,D. Karlen, K. Kasami,V. Kasey, I. Kato, H. Kawamuko,E. Kearns, L. Kellet,M. Khabibullin,M. Khaleeq, N. Khan,A. Khotjantsev,D. Kielczewska,T. Kikawa, J. Y. Kim, S-B Kim, N. Kimura,B. Kirby,J. Kisiel, P. Kitching, T. Kobayashi,G. Kogan, S. Koike,T. Komorowski,A. Konaka,L. L. Kormos,A. Korzenev,K. Koseki,Y. Koshio, Y. Kouzuma,K. Kowalik, V. Kravtsov, I. Kreslo, W. Kropp, H. Kubo,J. Kubota, Y. Kudenko,N. Kulkarni,L. Kurchaninov,Y. Kurimoto,R. Kurjata, Y. Kurosawa, T. Kutter,J. Lagoda,K. Laihem,R. Langstaff,M. Laveder, T. B. Lawson,P. T. Le,A. Le Coguie, M. Le Ross,K. P. Lee,M. Lenckowski,C. Licciardi, I. T. Lim,T. Lindner,R. P. Litchfield,A. Longhin,G. D. Lopez, P. Lu,L. Ludovici,T. Lux,M. Macaire,L. Magaletti, K. Mahn, Y. Makida, C. J. Malafis, M. Malek,S. Manly,A. Marchionni, C. Mark, A. D. Marino, A. J. Marone, J. Marteau, J. F. Martin, T. Maruyama,T. Maryon,J. Marzec,P. Masliah, E. L. Mathie,C. Matsumura, K. Matsuoka, V. Matveev,K. Mavrokoridis, E. Mazzucato, N. McCauley, K. S. McFarland,C. McGrew,T. McLachlan,I. Mercer,M. Messina, W. Metcalf,C. Metelko,M. Mezzetto,P. Mijakowski, C. A. Miller,A. Minamino, O. Mineev,S. Mine, R. E. Minvielle, G. Mituka, M. Miura,K. Mizouchi, J-P Mols,L. Monfregola,E. Monmarthe, F. Moreau,B. Morgan,S. Moriyama, D. Morris,A. Muir, A. Murakami, J. F. Muratore,M. Murdoch, S. Murphy,J. Myslik,G. Nagashima, T. Nakadaira,M. Nakahata,T. Nakamoto, K. Nakamura, S. Nakayama,T. Nakaya, D. Naples, B. Nelson, T. C. Nicholls, K. Nishikawa, H. Nishino, K. Nitta,F. Nizery, J. A. Nowak,M. Noy,Y. Obayashi,T. Ogitsu,H. Ohhata, T. Okamura, K. Okumura, T. Okusawa,C. Ohlmann,K. Olchanski,R. Openshaw, S. M. Oser,M. Otani,R. A. Owen, Y. Oyama, T. Ozaki, M. Y. Pac,V. Palladino, V. Paolone, P. Paul, D. Payne, G. F. Pearce, C. Pearson,J. D. Perkin, M. Pfleger, F. Pierre,D. Pierrepont,P. Plonski,P. Poffenberger,E. Poplawska,B. Popov, M. Posiadala,J-M Poutissou,R. Poutissou,R. Preece,P. Przewlocki, W. Qian, J. L. Raaf,E. Radicioni, K. Ramos,P. Ratoff,T. M. Raufer, M. Ravonel, M. Raymond, F. Retiere, D. Richards, J-L Ritou, A. Robert,P. A. Rodrigues,E. Rondio,M. Roney,M. Rooney, D. Ross,B. Rossi,S. Roth, A. Rubbia, D. Ruterbories, R. Sacco,S. Sadler, K. Sakashita,F. Sanchez, A. Sarrat, K. Sasaki,P. Schaack, J. Schmidt, K. Scholberg,J. Schwehr,M. Scott,D. I. Scully, Y. Seiya, T. Sekiguchi,H. Sekiya, G. Sheffer, M. Shibata, Y. Shimizu,M. Shiozawa,S. Short,M. Siyad, D. Smith, R. J. Smith, M. Smy,J. Sobczyk, H. Sobel, S. Sooriyakumaran,M. Sorel,J. Spitz,A. Stahl,P. Stamoulis, O. Star, J. Statter, L. Stawnyczy,J. Steinmann,J. Steffens,B. Still,M. Stodulski, J. Stone,C. Strabel, T. Strauss,R. Sulej,P. Sutcliffe, A. Suzuki, K. Suzuki, S. Suzuki,S. Y. Suzuki,Y. Suzuki,J. Swierblewski,T. Szeglowski, M. Szeptycka,R. Tacik, M. Tada,A. S. Tadepalli,M. Taguchi, S. Takahashi, A. Takeda,Y. Takenaga,Y. Takeuchi, H. A. Tanaka, K. Tanaka, M. Tanaka,M. M. Tanaka, N. Tanimoto, K. Tashiro,I. J. Taylor, A. Terashima,D. Terhorst,R. Terri, L. F. Thompson,A. Thorley,M. Thorpe, W. Toki, T. Tomaru, Y. Totsuka, C. Touramanis, T. Tsukamoto,V. Tvaskis, M. Tzanov, Y. Uchida, K. Ueno,M. Usseglio,A. Vacheret,M. Vagins, J. F. Van Schalkwyk, J-C Vanel, G. Vasseur,O. Veledar, P. Vincent, T. Wachala, A. V. Waldron,C. W. Walter,P. J. Wanderer, M. A. Ward,G. P. Ward,D. Wark,D. Warner, M. O. Wascko,A. Weber,R. Wendell,J. Wendland, N. West,L. H. Whitehead, G. Wikstroem, R. J. Wilkes, M. J. Wilking,Z. Williamson, J. R. Wilson, R. J. Wilson, K. Wong, T. Wongjirad, S. Yamada, Y. Yamada, A. Yamamoto, K. Yamamoto, Y. Yamanoi, H. Yamaoka, C. Yanagisawa, T. Yano,S. Yen,N. Yershov, M. Yokoyama,A. Zalewska,J. Zalipska,K. Zaremba,M. Ziembicki, E. D. Zimmerman, M. Zito,J. Zmuda
Nuclear physics newsno. 4 (2009): 26-33
JOURNAL OF CHEMICAL PHYSICSno. 5 (2008): 052301-052301
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