oliver d patterson

Oliver D. Patterson (Senior Member, IEEE) received the S.B. degree in electrical engineering from the Massachusetts Institute of Technology, Cambridge, MA, USA, the M.S. degree in electrical engineering from the University of Wisconsin–Madison, Madison, WI, USA, and the Ph.D. degree in electrical engineering from the University of Michigan at Ann Arbor, Ann Arbor, MI, USA. He is a Distinguished Member of Technical Staff with ASML, San Jose, CA, USA. He serves the role of Principle Technologist for Hermes-Microvision, an ASML company and the industry’s leading E-beam inspection tool supplier. He has previously worked with GLOBALFOUNDRIES, IBM Microelectronics, Lucent Technologies, and Agere Systems. His research interests include the use of e-beam inspection for detection of voltage contrast, physical and pattern fidelity defects and yield improvement in general. He is a member of the ASMC Technical Committee and was the conference Co-Chairman for ASMC 2014. He has served as a Guest Editor for the IEEE Transactions on Semiconductor Manufacturing numerous times.