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Research Interests

Papers共 30 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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Using a Wireless Temperature Measurement Wafer to Analyze the Cause of Critical Dimension Differences Between Tools
Seunguk Cha,Matteo Rossi, Bonwang Koo, Kwanghyun Jin, Vivek Jain
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-5, (2022)
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Author Statistics

#Papers: 29

#Citation: 817

H-Index: 15

G-Index: 22

Sociability: 5

Diversity: 2

Activity: 32

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