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Research Interests

Papers共 52 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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期刊级别
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Scatterometry Application on Cu/SiCN Surface Topography Towards High Volume Manufacturing
Soon Aik Chew, Joey Hung,Igor Turovets, Mohamed Saib, Avron Ger,Alain Moussa, Boyao Zhang,Joeri De Vos,Andy Miller,Anne-Laure Charley,Philippe Leray,Eric Beyne
2024 IEEE 10th Electronics System-Integration Technology Conference (ESTC)pp.1-5, (2024)
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Unique Spectral Interferometry Solutions for Complex High Aspect Ratio 3D NAND Structures
Jaesuk Yoon, Jongmin Park, Minjung Shin,Dongchul Ihm, Oshrat Bismuth, Smadar Ferber,Jacob Ofek,Igor Turovets, Isaac Kim
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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Spectral Interferometry for TSV Metrology in Chiplet Technology
Stefan Schoeche, Daniel Schmidt, Junwon Han, Shahid Butt, Katherine Sieg, Marjorie Cheng, Aron Cepler, Shaked Dror, Jacob Ofek, Ilya Osherov,Igor Turovets
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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Wafer-scale characterization for two-dimensional material layers
A. Moussa,J. Bogdanowicz,B. Groven,P. Morin, M. Beggiato,M. Saib, G. Santoro, Y. Abramovitz, K. Houchens, S. Ben Nissim, N. Meir,J. Hung, A. Urbanowicz,R. Koret,I. Turovets, B. Lee, W. T. Lee,G. F. Lorusso,A. -L. Charley
JAPANESE JOURNAL OF APPLIED PHYSICSno. 3 (2024)
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Spectral Interferometry for Fully Integrated Device Metrology
Daniel Schmidt,Manasa Medikonda,Michael Rizzolo, Claire Silvestre,Julien Frougier,Andrew Greene,Mary Breton,Aron Cepler,Jacob Ofek, Itzik Kaplan,Roy Koret,Igor Turovets
Journal of micro-nanopatterning, materials, and metrologyno. 03 (2023)
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300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
A. Moussa,J. Bogdanowicz,B. Groven,P. Morin, M. Beggiato,M. Saib, G. Santoro, Y. Abramovitz, K. Houchens, S. Ben Nissim, N. Meir,J. Hung, A. Urbanowicz,R. Koret,I. Turovets,G. F. Lorusso,A. -L. Charley
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII (2023)
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Vertical Travelling Scatterometry for Metrology on Fully Integrated Devices
D. Schmidt,M. Medikonda,M. Rizzolo, C. Silvestre,J. Frougier,A. Greene,M. Breton, A. Cepler, J. Ofele, I Kaplan,R. Koret,I Turovets
Metrology, Inspection, and Process Control XXXVI (2022)
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Author Statistics

#Papers: 52

#Citation: 539

H-Index: 13

G-Index: 22

Sociability: 5

Diversity: 2

Activity: 2

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