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    • Research Interests
    ScatterometryHybrid MetrologyCd-SemCritical DimensionSpectral Interferome...Spectral Interferometry2010202020072025
    19942024

    Papers共 52 篇Patents共 88 篇Author StatisticsCo-AuthorSimilar Experts

    By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
    时间
    引用量
    主题
    期刊级别
    合作者
    合作机构
    All20242023202220212020201920182016201520142013201220112002199919981997199619951994
    Unique Spectral Interferometry Solutions for Complex High Aspect Ratio 3D NAND Structures
    Jaesuk Yoon, Jongmin Park, Minjung Shin,Dongchul Ihm, Oshrat Bismuth, Smadar Ferber,Jacob Ofek,Igor Turovets, Isaac Kim
    METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
    Cited0Views0Bibtex
    0
    0
    Wafer-scale Characterization for Two-Dimensional Material Layers
    A. Moussa,J. Bogdanowicz,B. Groven,P. Morin, M. Beggiato,M. Saib, G. Santoro, Y. Abramovitz, K. Houchens, S. Ben Nissim, N. Meir,J. Hung, A. Urbanowicz,R. Koret,I. Turovets, B. Lee, W. T. Lee,G. F. Lorusso,A. -L. Charley
    JAPANESE JOURNAL OF APPLIED PHYSICSno. 3 (2024)
    Cited0Views0Bibtex
    0
    0
    Spectral Interferometry for Fully Integrated Device Metrology
    Daniel Schmidt,Manasa Medikonda,Michael Rizzolo, Claire Silvestre,Julien Frougier,Andrew Greene,Mary Breton,Aron Cepler,Jacob Ofek, Itzik Kaplan,Roy Koret,Igor Turovets
    Journal of Micro/Nanopatterning Materials and Metrologyno. 03 (2023)
    Cited0Views22Bibtex
    0
    22
    300Mm In-Line Metrologies for the Characterization of Ultra-Thin Layer of 2D Materials
    A. Moussa,J. Bogdanowicz,B. Groven,P. Morin, M. Beggiato,M. Saib, G. Santoro, Y. Abramovitz, K. Houchens, S. Ben Nissim, N. Meir,J. Hung, A. Urbanowicz,R. Koret,I. Turovets,G. F. Lorusso,A. -L. Charley
    METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII (2023)
    Cited0Views0Bibtex
    0
    0
    Vertical Travelling Scatterometry for Metrology on Fully Integrated Devices
    D. Schmidt,M. Medikonda,M. Rizzolo, C. Silvestre,J. Frougier,A. Greene,M. Breton, A. Cepler, J. Ofele, I Kaplan,R. Koret,I Turovets
    Metrology, Inspection, and Process Control XXXVI (2022)
    Cited4Views11Bibtex
    4
    11
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    Author Statistics
    00.20.40.60.81#Papers#CitationH-IndexG-IndexSociabilityDiversityActivity

    #Papers: 52

    #Citation: 522

    H-Index: 12

    G-Index: 22

    Sociability: 5

    Diversity: 2

    Activity: 2

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    • 合作者
    • 学生
    • 导师
    Aaron Lewis合作论文数
    Department of Applied Physics, Faculty of Science, The Hebrew University of Jerusalem18
    Daniel Palanker合作论文数
    Department of Ophthalmology, School of Medicine, Stanford University16
    Roy Koret合作论文数
    13
    Aron Cepler合作论文数
    8
    Mary Breton合作论文数
    IBM Research7
    Matthew Sendelbach合作论文数
    7
    I Hemo合作论文数
    6
    Joey Hung合作论文数
    6
    Anne-laure Charley合作论文数
    6
    Cornel Bozdog合作论文数
    Department of Physics, Lehigh University6
    Philippe Leray合作论文数
    Université Paris6
    B. Brill合作论文数
    The Braun Center for Submicron Research, Weizmann Institute of Science5
    Frougier Julien合作论文数
    5
    Avron Ger合作论文数
    4
    Andrew M. Greene合作论文数
    4
    helen kim合作论文数
    4
    Manasa Medikonda合作论文数
    Coll. of Nanoscale Sci. & Eng., Univ. at Albany;c;Coll. of Nanoscale Sci. & Eng., Univ. at Albany4
    Alok Vaid合作论文数
    4
    Alain Moussa合作论文数
    4
    Hanan Zauberman合作论文数
    4
    Boris Sherman合作论文数
    Department of Chemical Physics, The Weizmann Institute of Science4
    R. Koret合作论文数
    3
    carsten hartig合作论文数
    3
    peter ebersbach合作论文数
    3
    Marjorie Cheng合作论文数
    3
    Jacob Ofek合作论文数
    3
    erin mclellan合作论文数
    3
    ronen urensky合作论文数
    3
    michael rizzolo合作论文数
    IBM Res, 257 Fuller Rd, Albany, NY 12203 USA3
    Sayantan Das合作论文数
    IMEC3
    Mark Kelling合作论文数
    3
    John A. Allgair合作论文数
    sematech3
    Narender Rana合作论文数
    3
    Sandip Halder合作论文数
    3
    Daniel Schmidt合作论文数
    Department of Data Science and Artificial Intelligence, Faculty of Information Technology, Monash University3
    J. Hung合作论文数
    2
    dror shafir合作论文数
    2
    Benjamin L. D. Groven合作论文数
    2
    Mohamed Saib合作论文数
    2
    A.-L. Charley合作论文数
    2
    ilan englard合作论文数
    2
    Hayley Johanesen合作论文数
    2
    stephane godny合作论文数
    2
    michael sendler合作论文数
    2
    Curtis Durfee合作论文数
    2
    ahmad d katnani合作论文数
    2
    Anne Kenslea合作论文数
    2
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