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论文共 9 篇作者统计合作学者相似作者

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Optimization of Lithography Performance at Different Manhattan Levels of ILT and Electron Beam Shot Size
Cuixiang Wang, Yu Mu, Futian Wang,Juan Wei, Ruihua Liu, Enqiang Tian,Di Liang,Yufei Sha, Yaokun Li, Hao Yang, Song Sun,Miao Jiang,Qingchen Cao,Jiangliu Shi
Photomask Technology 2024 (2024)
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Contour-based Mask Quantization Methodology for Curvilinear ILT Mask and on Wafer Performance Analysis
Futian Wang, Xiaonan Liu,Juan Wei,Miao Jiang, Cuixiang Wang, Yu Mu, Enqiang Tian, Yaokun Li,Song Sun, Ruihua Liu, Jiahao Xi,Yufei Sha,Di Liang, Hao Yang,Qingchen Cao,Jiangliu Shi
Photomask Technology 2024 (2024)
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Line edge roughness analysis and simulation at advanced litho process
Yufei Sha, Jiahao Xi,Liang Li,Miao Jiang,Di Liang, Ran Zhang, Ganlin Song, Enqiang Tian, Xiuyan Cheng, Futian Wang, Cuixiang Wang,Guangying Zhou,Mingyi Yao,Jiangliu Shi
2023 International Workshop on Advanced Patterning Solutions (IWAPS)pp.1-3, (2023)
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Resolution Improvement Review for the Immersion Lithography
Miao Jiang,Di Liang,Binbin Yan,Liang Li,Mingqi Gao,Joer Huang,Andy Lan,Jiangliu Shi
2022 International Workshop on Advanced Patterning Solutions (IWAPS)pp.1-4, (2022)
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Frame Mark Selection, Placement, Design and Simulation
Binbin Yan,Miao Jiang,Di Liang,Liang Li,Wei Feng,Joer Huang,Dajun Wu,Andy Lan,Jiangliu Shi
2022 International Workshop on Advanced Patterning Solutions (IWAPS)pp.1-4, (2022)
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作者统计

#Papers: 9

#Citation: 1

H-Index: 1

G-Index: 1

Sociability: 4

Diversity: 1

Activity: 0

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