Cedric Monget

Cedric Monget received the Engineer degree in physics from the Institut National Polytechnique de Grenoble, Grenoble, France, in 1996 and the M.S. and Ph.D. degrees in materials science from the University Joseph Fourier de Grenoble, Grenoble, in 1996 and 1999, respectively. Since 1999, he has been an RD Process Engineer with STMicroelectronics, Crolles, France, where he has been working on back-end-of-line (BEOL) etching processes and then switched to BEOL lithography applications. Since 2007, in addition of the expertise on advanced resist processes, he has been in charge of the coordination of C045 BEOL process integration.