Towards Unparallelled CMOS-compatible Air-coupled Pmut Performance with 30% Sc-doped AlN Through an Analysis of Residual Stress Effects

Jihang Liu, Goh Duan Jian, Daniel Ssu-Han Chen, David Choong Sze Wai, Trivedi Shyam,Prakasha Chigahalli Ramegowda,Merugu Srinivas, Lin Huamao, Zhang Qing Xin, Peter Chang Hyun Kee, Amal Das, Alessandra Sciarrone, Alberto Leotti, Domenico Giusti, Joshua E.-Y. Lee, Yul Koh

2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)（2024）

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ScAlN,pMUT,residual stress,electromechanical coupling factor

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