Fabrication and Characterization of Submillimeter-Wave GaAs Quasi-Vertical Schottky Diodes Diffusion Bonded to Silicon

Christopher Moore, Richard Zhou, Dustin Widmann, Louis Lukaczyk, Michael Cyberey, Matthew Bauwens,Scott Barker, Robert Weikle,Arthur Lichtenberger

2024 54th European Microwave Conference (EuMC)(2024)

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关键词
diode,quasi-vertical Schottky diode,submillimeter-wave,on-wafer measurement,heterogenous integration,diffusion bonding
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