Edge-Field-Suppression for Improved Breakdown and Leakage in Vertical $\beta$ -Ga $_{\text{2}}$ O $_{\text{3}}$ Schottky Barrier Diode Through Trench Field Limiting Rings

Xue-Qiang Ji, Jian-Ying Yue, Jin-Jin Wang, Hao-Chen Zheng, Shan Li, Zeng Liu,Lei Shu,Wei-Hua Tang,Pei-Gang Li

IEEE Transactions on Electron Devices(2024)

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关键词
Field limiting ring (FLR),gallium oxide (Ga $_{\text{2}}$ O $_{\text{3}}$ ),Schottky diodes,trench
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