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Stabilization of Tetragonal Phase in Hafnium Zirconium Oxide by Cation Doping for High-K Dielectric Insulators.

Jae Young Kim,Sung Hyuk Park, Yeong Jae Kim,Jae Hyun Kim, Sung Kyun Choi, Hee Ryeong Kwon, Yoon Jung Lee, Seung Ju Kim, Dongmin Shin, Byungwook Yeo, Beom-Jong Kim, Hyung-Suk Jung,Ho Won Jang

ACS APPLIED MATERIALS & INTERFACES（2024）

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关键词
high-k dielectric,hafnium zirconium oxide,cation doping,phase stabilization
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