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Oxidation Anisotropy of 4H-Sic Wafers During Chemical-Mechanical Polishing

Wantang Wang, Xuesong Lu,Xinke Wu,Rong Wang,Deren Yang,Xiaodong Pi

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING(2025)

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关键词
4H-SiC wafers,Chemical-mechanical polishing,Oxidation anisotropy
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