Source/Drain Epitaxy for Nanosheet-Based CFET Devices
Erik Rosseel,Clement Porret, Thomas Dursap, Roger Loo,Hans Mertens, Jishnu Ganguly, Ritam Sarkar, Camila Cavalcante,Olivier Richard,Jef Geypen,Brendan Marozas, Daniel Casey,Rami Khazaka,Steven Demuynck,Lucas P. B. Lima,Robert Langer,Serge Biesemans,Naoto Horiguchi ECS Transactions（2024）
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