Design and Simulation of a High-Responsivity Dielectric Metasurface Si-Based InGaAs Photodetector

Hengyang Dong, Yujie Wu, Hongbo Zheng, Pandi Chen, Wenhao Deng,Liuhong Ma,Xinyuan Dong,Zhiyong Duan,Mengke Li

PHOTONICS（2024）

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Si-based optical interconnection,dielectric metasurface,Si-based InGaAs photodetector,high responsivity,ART epitaxial technology

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