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Feasibility Study of CMOS Sensors in 55 Nm Process for Tracking

Zhuojun Chen, Ruoshi Dong, Leyi Li,Yiming Li,Weiguo Lu,Yunpeng Lu, Ivan Peric,Jianchun Wang,Zhiyu Xiang, Kunyu Xie,Zijun Xu, Hui Zhang,Mei Zhao,Yang Zhou,Hongbo Zhu, Xiaoyu Zhu

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT(2024)

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Key words
CMOS sensor,MAPS,55 nm
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