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Demonstration of Large MW and Prominent Endurance in a Hf0.5Zr0.5O2 FeFET with IGZO Channel Utilizing Postdeposition Annealing

Pan Xu,Pengfei Jiang, Yang,Tiancheng Gong, Wei,Yuan Wang,Xiao Long,Jiebin Niu, Zijing Wu, Xueyang Peng,Zhenhua Wu,Qing Luo

IEEE ELECTRON DEVICE LETTERS（2024）

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Key words
ferroelectric,BEOL,HZO,FeFET,FeFET,BEOL,FeFET,postde- position annealing
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